Piezo Stage SPPS-20

The SPPSK-20 is a high-precision, extended travel linear piezo stage. The miniature crossed roller bearing guarantees superior stiffness as well as leading precision for a load of up to twenty N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high-speed (> 2 mm/s) and high blocking force (> 2 N). The SPPSK-20 is offered in an open loop or alternatively with an external encoder. The closed-loop resolution is possible of 2 nm. This model is capable operating in vacuum (10-9 mbar) and/or cryo (4 Kelvin).

KEY FEATURES:

• Travel: 12 - 51 mm
• Load, max: 2 kg
• Speed, max: 2 mm/s
• Resolution, typical: 2 nm
• Repeatability, bi-directional: ± 20 nm
• Repeatability, uni-directional: 20 nm
• Encoder Options: Analog, Digital

​
  

Travel Dependent Specifications:

Travel range [mm]

12

18

26

38

51

Straightness/Flatness [µm]

± 1

± 1.5

± 1.5

± 2

± 2.5

Pitch [µrad]

± 60

± 80

± 80

± 90

± 100

Yaw [µrad]

± 70

± 90

± 90

± 100

± 100

Weight [g]

17

24

34

51

68

Motor Compatibility:

Motor option

Piezo Motor, PM-002

Speed, max [mm/s]

2 (MMC-100), 10 (MMC-110)

Motor/Feedback Dependent Specifcations:

Encoder option

None (open loop)

Analog (1 Vpp)

Digital (RS-422)

Resolution, typical [nm]

1

10

2

Repeatability, bi-directional [nm]

n/a

± 50

± 20

Repeatability, uni-directional [nm]

n/a

50

20

Accuracy [µm]

-

± 1

± 1

Load Characteristics:

Orientation

Fx [N]

Fy [N]

Fz [N]

Mx [N·m]

My [N·m]

Mz [N·m]

Load, max

2

20

20

0.7

0.7

0.7

Download Datasheet 

CAD MODELS

Part number	Drawing	E-drawing	3D Preview	Step file	Other 3D Formats
PPS-20-11206
PPS-20-12009
PPS-20-12206
PPS-20-13206
PPS-20-14206
PPS-20-15206