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piezoelectric-actuator-and-stage

Piezo Actuator Stage SPP-22

Piezo Actuator Stage SPP-22
Add to cart Piezo stage, Controller & Piezo Driver Price
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The SPPK-22 is a small dimension, linear piezo stage suitable for multi-phase piezo motor for improved accuracy and weight transporting ability. The use of a pair of steel ball bearings promises smooth as well as stable motions over a travel length of 12 mm. An optional linear encoder provides high-quality repeatability. The SPPK-22 can be simply stacked in XY and XYZ Tables. The piezo stage is available in Vacuum as well as Ultra High Vacuum (10-9 mbar) compatible models.

KEY FEATURES:
  • Travel: 12 mm
  • Load, max: 1 kg
  • Speed, max: 2 mm/s
  • Resolution, typical: 10 nm
  • Repeatability, bi-directional: ± 50 nm
  • Repeatability, uni-directional: 50 nm
  • Encoder Options: Analog

Travel Dependent Specifications:
Travel range [mm] 12
Straightness/Flatness [µm] ± 2
Pitch [µrad] ± 150
Yaw [µrad] ± 150
Weight [g] 15
Motor Compatibility:
Motor option Piezo Motor, PM-002
Speed, max [mm/s] 2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifcations:
Encoder option None (open loop) Analog (1 Vpp)
Resolution, typical [nm] 1 10
Repeatability, bi-directional [nm] n/a ± 50
Repeatability, uni-directional [nm] n/a 50
Accuracy [µm] - ± 1
Load Characteristics:
Orientation Fx [N] Fy [N] Fz [N] Mx [N·m] My [N·m] Mz [N·m]
Load, max 2 10 10 0.6 0.6 0.6


  Download Datasheet 

CAD MODELS
Part number Drawing E-Drawing 3D Preview Step file Other 3D Formats
PP-22-11000      
PP-22-11006      
PP-22-11009      
PP-22-11200      
PP-22-11206      
PP-22-11209