Piezo Actuator SPPX-32

The SPPXK-32 is a small dimension, long travel Piezo, integrated with a XY stage having only 14 mm of height. This Piezo stage assures smooth and secure motion for loads around 10 N, due to the 4 pre-loaded ball slides. It makes use of a multi-phase piezo motor causing high speed (> 2 mm/s) and high blocking force (> 2 N). The SPPXK-32 is available in open loop or with a linear glass scale encoder. Closed-loop resolution of 10 nm is possible. This Model is capable of process in vacuum (10-9 mbar). The SPPXK-32 is best with the SMMCK-100 as well as SMMCK-110 controllers.

KEY FEATURES:

• Travel: 18 x 18 mm
• Load, max: 1 kg
• Speed, max: 2 mm/s
• Resolution, typical: 10 nm
• Repeatability, bi-directional: ± 50 nm
• Repeatability, un-directional: 50 nm
• Encoder Options: Analog

 

Travel Dependent Specifications:
Travel range [mm]					18 x 18
Straightness/Flatness [µm]					± 2.5
Pitch [µrad]					± 200
Yaw [µrad]					± 100
Weight [g]					40
Motor Compatibility:
Motor option				Piezo Motor, PM-002
Speed, max [mm/s]				2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifications:
Encoder option						None (open loop)			Analog (1 Vpp)
Resolution, typical [nm]						1			10
Repeatability, bi-directional [nm]						n/a			± 50
Repeatability, uni-directional [nm]						n/a			50
Accuracy [µm]						-			± 1
Load Characteristics:
Orientation	Fx [N]	Fy [N]	Fz [N]				Mx [N·m]	My [N·m]		Mz [N·m]
Load, max	2	2	10				0.6	0.6		0.6

 Download Datasheet 

CAD MODELS

Part number	Drawing	E-Drawing	3D Preview	Step file	Other 3D Formats
PPX-32-11000
PPX-32-11006
PPX-32-11009
PPX-32-11200
PPX-32-11206
PPX-32-11209

 

The SPPK-20 Piezo works with the  SMMCK-100 Piezo Controller    as well as the SMMCK-110